Paper
30 January 1987 Laser Monitors For Trace Species In Environmental And Industrial Processes
C. E. Kolb, J. Wormhoudt, A. Freedman, M. S. Zahniser, D. R. Worsnop, P. Kebabian, S. Anderson
Author Affiliations +
Proceedings Volume 0709, Laser Research and Development in the Northeast; (1987) https://doi.org/10.1117/12.937278
Event: Cambridge Symposium-Fiber/LASE '86, 1986, Cambridge, MA, United States
Abstract
Aerodyne Research, Inc. is pursuing an active research program aimed at the discovery, development and demonstration of new laser based techniques for the measurement of trace molecular species of interest in environmental and industrial processes. Laser technology exploited in these efforts include advanced lead salt tunable diode, IR HeNe, dye and excimer systems. Specific examples of environmental applications include atmospheric boundary layer trace flux measurements for biogenic, photochemical and combustion produced trace species such as CH4, N20, OCS, 03, NO2, HNO3, and SO2 important in stratospheric ozone layer chemistry, acid dry deposition and atmospheric greenhouse studies. Methods for probing the trace species content of natural water samples will also be discussed. Laser based monitoring systems for industrial processes include detectors for key reactive species in microcircuit fabrication techniques such as plasma etching and chemical vapor deposition and trace species monitoring in molten foundry metals and electronic chip materials.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C. E. Kolb, J. Wormhoudt, A. Freedman, M. S. Zahniser, D. R. Worsnop, P. Kebabian, and S. Anderson "Laser Monitors For Trace Species In Environmental And Industrial Processes", Proc. SPIE 0709, Laser Research and Development in the Northeast, (30 January 1987); https://doi.org/10.1117/12.937278
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KEYWORDS
Absorption

Laser development

Semiconductor lasers

Chlorine

Environmental monitoring

Plasma

Environmental sensing

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