High power excimer lasers which can deliver average powers of 100 W or more have been commercially available since 1983 when Lambda Physik introduced its model EMG 203 MSC. This progress was the result of a new proprietary switching technique (Magnetic Switch Control or MSC) which allowed unprecedented control of the energy flow through the high voltage discharge circuitry. In conjunction with a carefully designed gas flow and the judicious choice of components, this technique has meanwhile enabled the design of a large variety of reliable excimer systems including injection locked systems, lasers which deliver 120 W average power and lasers which can operate at up to 1000 Hz pulse repetition rate.
"High Average Power Commercial Excimer Lasers", Proc. SPIE 0710, Excimer Lasers and Optics, (11 March 1987); doi: 10.1117/12.937288; https://doi.org/10.1117/12.937288