11 March 1987 High Average Power Commercial Excimer Lasers
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Proceedings Volume 0710, Excimer Lasers and Optics; (1987) https://doi.org/10.1117/12.937288
Event: Cambridge Symposium-Fiber/LASE '86, 1986, Cambridge, MA, United States
High power excimer lasers which can deliver average powers of 100 W or more have been commercially available since 1983 when Lambda Physik introduced its model EMG 203 MSC. This progress was the result of a new proprietary switching technique (Magnetic Switch Control or MSC) which allowed unprecedented control of the energy flow through the high voltage discharge circuitry. In conjunction with a carefully designed gas flow and the judicious choice of components, this technique has meanwhile enabled the design of a large variety of reliable excimer systems including injection locked systems, lasers which deliver 120 W average power and lasers which can operate at up to 1000 Hz pulse repetition rate.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jack Andrellos, Jack Andrellos, Mary Essary, Mary Essary, Herbert Pummer, Herbert Pummer, } "High Average Power Commercial Excimer Lasers", Proc. SPIE 0710, Excimer Lasers and Optics, (11 March 1987); doi: 10.1117/12.937288; https://doi.org/10.1117/12.937288


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