23 February 1987 Monolithically Integrable High Speed Photodetectors
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Proceedings Volume 0716, High Frequency Optical Communications; (1987) https://doi.org/10.1117/12.937457
Event: Cambridge Symposium-Fiber/LASE '86, 1986, Cambridge, MA, United States
Abstract
Monolithically integrable lateral PIN detectors have been developed. The device fabrication procedure has been optimized to be compatible with standard integrated circuit fabrication procedures.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
D J Jackson, D J Jackson, D L Persechini, D L Persechini, } "Monolithically Integrable High Speed Photodetectors", Proc. SPIE 0716, High Frequency Optical Communications, (23 February 1987); doi: 10.1117/12.937457; https://doi.org/10.1117/12.937457
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