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28 April 1987 Micromachined Resonant Structures
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Proceedings Volume 0718, Fiber Optic and Laser Sensors IV; (1987) https://doi.org/10.1117/12.937502
Event: Cambridge Symposium-Fiber/LASE '86, 1986, Cambridge, MA, United States
Abstract
Micromachined structures, usually formed by anistropic etchings in silicon, can be fabricated with high precision at low cost and may form the basis of a variety of low power consumption resonant frequency mircotransducers. Such structures are compatible with direct optical excitation of their mechanical vibra, on and as such form an attractive family of fibre optic sensors. This paper reviews the basic features of these micromachined structures and presents an assessment of their performance potential as fibre optic sensors.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
B Culshaw, D Uttam, J Nixon, K Thornton, and A Wright "Micromachined Resonant Structures", Proc. SPIE 0718, Fiber Optic and Laser Sensors IV, (28 April 1987); https://doi.org/10.1117/12.937502
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