18 May 1987 Template-Set Approach to VLSI Pattern Inspection
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Proceedings Volume 0730, Automated Inspection and Measurement; (1987) https://doi.org/10.1117/12.937868
Event: Cambridge Symposium_Intelligent Robotics Systems, 1986, Cambridge, MA, United States
Abstract
A new approach is described for the automatic detection of defects in VLSI circuit patterns such as photomasks and wafers. It is based on morphological feature extraction using templates that represent a set of local pixel configurations within a specified window. These templates are stored in content-addressable memories (CAMs) to facilitate parallel comparisons of window-pattern scanning over a tested image. Maskable CAMs reduce the size of a template set substantially. Two error-detection algorithms are implemented to detect both random defects and dimensional errors.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Soo-Ik Chae, Soo-Ik Chae, James T. Walker, James T. Walker, David H. Dameron, David H. Dameron, Chong-Cheng Fu, Chong-Cheng Fu, James D. Meindl, James D. Meindl, } "Template-Set Approach to VLSI Pattern Inspection", Proc. SPIE 0730, Automated Inspection and Measurement, (18 May 1987); doi: 10.1117/12.937868; https://doi.org/10.1117/12.937868
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