A High Resolution Coordinate Measuring Machine for the Testing of X-Ray-Mirrors

K. Becker; E. Heynacher

doi:10.1117/12.964905

1 January 1986 A High Resolution Coordinate Measuring Machine for the Testing of X-Ray-Mirrors

K. Becker, E. Heynacher

Author Affiliations +

Proceedings Volume 0733, Soft X-Ray Optics and Technology; (1986) https://doi.org/10.1117/12.964905
Event: Soft X-Ray Optics and Technology, 1987, Berlin, Germany

Abstract

For the purpose of detecting tangent errors down to 0,1 arc sec on x-ray-mirrors, a computer controlled 3-axis coordinate measurement machine (CMM) has been developed which allows a position resolution of 10 nm in all coordinates. The concept of this CMM is based on the complete separation of machine controlling and measuring systems. Thus the measurements are not related the quality of machine axis but to the quality of reference mirrors which form normals for the three coordinate axes. Experiments performed until now show a reproducibility of better than 0,1 arc sec for linear measurements. Measurements of three dimensional structures are in preparation.

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K. Becker and E. Heynacher "A High Resolution Coordinate Measuring Machine for the Testing of X-Ray-Mirrors", Proc. SPIE 0733, Soft X-Ray Optics and Technology, (1 January 1986); https://doi.org/10.1117/12.964905

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