X-UV Optics in near-normal incidence realised at the "Institut d'Optique"

J. P. Chauvineau; J. P. Marioge; F. Bridou; G. Tissot; L. Valiergue; B. Bonino

doi:10.1117/12.964925

1 January 1986 X-UV Optics in near-normal incidence realised at the "Institut d'Optique"

J. P. Chauvineau, J. P. Marioge, F. Bridou, G. Tissot, L. Valiergue, B. Bonino

Proceedings Volume 0733, Soft X-Ray Optics and Technology; (1986) https://doi.org/10.1117/12.964925
Event: Soft X-Ray Optics and Technology, 1987, Berlin, Germany

Abstract

Two objectives to be used at 304 Å, in near-normal incidence have been made at IOTA : one is Ritchey-Chretien Telescope, the other is a Schwarzschild microscope used to observe laser heated targets. They are both made from two spherical surfaces shaped with an accuracy of λ/10, and covered by Si/Re-Wmultilayers. For the Ritchey- Chretien, the surfaces were aspherized by vacuum deposition before coating. Multilayer period and interface roughness were evaluated by using X-ray reflectanetry during the deposition process and grazing incidence X-ray reflectometry after the multilayer coating. A 7 A rms roughness for Si, 10 AÅ for W-Re, and a reflectivity of 10% were evaluated for each telescope mirror. For minimazing aberrations, the two mirrors of the Schwarzschild microscope were very accurateley centered. Results shows a resolution better than 4 gm for this instrument at the 304 Å wavelenght used.

Citation Download Citation

J. P. Chauvineau, J. P. Marioge, F. Bridou, G. Tissot, L. Valiergue, and B. Bonino "X-UV Optics in near-normal incidence realised at the "Institut d'Optique"", Proc. SPIE 0733, Soft X-Ray Optics and Technology, (1 January 1986); https://doi.org/10.1117/12.964925

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