Paper
1 January 1987 Mapping GaAs Photoluminescence
Raymond Kaminski
Author Affiliations +
Proceedings Volume 0743, Fluorescence Detection; (1987) https://doi.org/10.1117/12.966929
Event: OE LASE'87 and EO Imaging Symposium, 1987, Los Angeles, CA, United States
Abstract
Photoluminescence spectroscopy is one of the most effective methods for characterizing semiconductor materials like silicon, gallium arsenide or indium phosphide. This analytical technique supplies data that tells the researcher how well devices fabricated from a. particular material can be expected to perform. The information can then be used to optimize growing conditions or to reject a sample before additional processing. Such increases in, and stabilization of device yield are critical in a very competitive marketing environment.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Raymond Kaminski "Mapping GaAs Photoluminescence", Proc. SPIE 0743, Fluorescence Detection, (1 January 1987); https://doi.org/10.1117/12.966929
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KEYWORDS
Luminescence

Gallium arsenide

Silicon

Semiconducting wafers

Fluorescence spectroscopy

Boron

Crystals

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