20 April 1987 Fabrication Of An 8:1 Ellipsoidal Mirror For A Synchrotron X-Ray Microprobe
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Proceedings Volume 0749, Metrology: Figure and Finish; (1987) https://doi.org/10.1117/12.939839
Event: OE LASE'87 and EO Imaging Symposium, 1987, Los Angeles, CA, United States
The fabrication of an R:1 demagnifying ellipsoidal mirror to be used for an x-ray microprobe at the National Synchrotron Light Source X-26 beam port. The design aim was to produce a mirror that could be used over the photon energy range from about I to 17 keV. The 300-mm long mirror was required to operate at a grazing angle of 5 mr. The semimaior axis was 4500 mm and the semiminor axis 14.142 mm. Surface roughness of 1 nm or less and slope errors of 1 arc second parallel to the long axis and 2nn arc seconds parallel to the short direction were specified. Production of the first electroless nickel-coated aluminum mirror using a diamond-turning technique has been completed. The mirror meets the 1 arc sec surface figure specification except for areas near the ends of the mirror. The reasons for these deviations arise from subtle details of the diamond-turning process which have not been fully incorporated into the computer program that controls the diamond-turning machines. Further work in computer correction of repeatable errors of the diamond-turning machine can eliminate the waviness at the ends of the mirror. The diamond-turned mirror surface was not fully polished under this effort and therefore does not meet the roughness specification; however, surface smoothness of a fully polished cylindrical mirror manufactured using the same techniques does meet the specification. It can be concluded that it is now technically feasible to meet the required specifications for the mirror and that the x-ray microprobe based on its use can be achieved.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Keith W. Jones, Peter Z. Takacs, Jerome B. Hastings, John M. Casstevens, and Christopher D. Pionke "Fabrication Of An 8:1 Ellipsoidal Mirror For A Synchrotron X-Ray Microprobe", Proc. SPIE 0749, Metrology: Figure and Finish, (20 April 1987); doi: 10.1117/12.939839; https://doi.org/10.1117/12.939839

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