Frequency Analysis And Filtering Of Surface Profile Data

Scott L. DeVore

doi:10.1117/12.939845

20 April 1987 Frequency Analysis And Filtering Of Surface Profile Data

Scott L. DeVore

Proceedings Volume 0749, Metrology: Figure and Finish; (1987) https://doi.org/10.1117/12.939845
Event: OE LASE'87 and EO Imaging Symposium, 1987, Los Angeles, CA, United States

Abstract

Frequency-domain analysis offers several advantages when considering surface profile measurements. Vibration of the sample during the measurement is often clearly defined in the profile frequency spectrum and its effect on the measured data can be reduced by an appropriate filter. The finish of surfaces with periodic height variations (such as diffraction gratings) can be measured if the periodic structure is first removed. This paper examines the application of frequency filtering techniques to these problems.

Citation Download Citation

Scott L. DeVore "Frequency Analysis And Filtering Of Surface Profile Data", Proc. SPIE 0749, Metrology: Figure and Finish, (20 April 1987); https://doi.org/10.1117/12.939845

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