20 April 1987 Frequency Analysis And Filtering Of Surface Profile Data
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Proceedings Volume 0749, Metrology: Figure and Finish; (1987) https://doi.org/10.1117/12.939845
Event: OE LASE'87 and EO Imaging Symposium, 1987, Los Angeles, CA, United States
Abstract
Frequency-domain analysis offers several advantages when considering surface profile measurements. Vibration of the sample during the measurement is often clearly defined in the profile frequency spectrum and its effect on the measured data can be reduced by an appropriate filter. The finish of surfaces with periodic height variations (such as diffraction gratings) can be measured if the periodic structure is first removed. This paper examines the application of frequency filtering techniques to these problems.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Scott L. DeVore, "Frequency Analysis And Filtering Of Surface Profile Data", Proc. SPIE 0749, Metrology: Figure and Finish, (20 April 1987); doi: 10.1117/12.939845; https://doi.org/10.1117/12.939845
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