Translator Disclaimer
25 August 1987 Dissolution And Swelling Studies Of Poly(Methyl Methacrylate) Resist Films
Author Affiliations +
Abstract
The swelling and dissolution of thin film poly(methyl methacrylate), PMMA, in methyl isobutyl ketone (MIBK), and in solvent/nonsolvent mixtures of MIBK/methanol and methyl ethyl ketone/isopropanol have been investigated. Films were monitored using in situ ellipsometry. Parametric studies of the effects of molecular weight, molecular weight distribution, softbaking quench rate, solvent size, and temperature were performed with MIBK. These parameters were shown to have a significant effect on dissolution. The effects of solvent composition and temperature on swelling and dissolution were investigated with the binary solvents. Ternary diagrams based on Flory-Huggins interaction parameters were used to interpret the thermodynamics of swelling and dissolution. A narrow transition region (NTR) where the developer changed from a swelling to dissolving agent with a small change in composition or temperature was observed.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. S. Papanu, J. Manjkow, D. W. Hess, D. S. Soong, and A. T. Bell "Dissolution And Swelling Studies Of Poly(Methyl Methacrylate) Resist Films", Proc. SPIE 0771, Advances in Resist Technology and Processing IV, (25 August 1987); https://doi.org/10.1117/12.940313
PROCEEDINGS
9 PAGES


SHARE
Advertisement
Advertisement
Back to Top