1 January 1987 Performance Evaluation Of The Ateq Core-2000 Scanning Laser Reticle Writer
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Abstract
ATEQ Corporation has developed a high precision, high performance optical lithography system, the CORE-2000, based on scanning laser technology and optimized for the high speed writing of 5X and 10X reticles. A detailed evaluation of this system has been made using Nikon 21 measurement systems, KLA inspection systems, and throughput benchmark test patterns. This paper briefly describes the CORE-2000 and presents the results of this evaluation including registration performance, critical dimension control, defect control and throughput.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gary A. Burns, Gary A. Burns, James A. Schoeffel, James A. Schoeffel, } "Performance Evaluation Of The Ateq Core-2000 Scanning Laser Reticle Writer", Proc. SPIE 0772, Optical Microlithography VI, (1 January 1987); doi: 10.1117/12.967059; https://doi.org/10.1117/12.967059
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