Development Of Compact Synchrotron Radiation Ring For X-Ray Lithography

Hiroshi Takada; Kouhei Furukawa; Takio Tomimasu

doi:10.1117/12.940379

30 June 1987 Development Of Compact Synchrotron Radiation Ring For X-Ray Lithography

Hiroshi Takada, Kouhei Furukawa, Takio Tomimasu

Proceedings Volume 0773, Electron-Beam, X-Ray, and Ion-Beam Lithographies VI; (1987) https://doi.org/10.1117/12.940379
Event: Microlithography Conferences, 1987, Santa Clara, CA, United States

Abstract

The design parameters of a compact synchrotron radiation (SR)ring dedicated to industrial X-ray lithography are discussed. Further studies have been continued for making the SR ring and its injector smaller to complete a practical SR system. The Electrotechnical Laboratory and Sumitomo Electric Industries, Ltd. jointly completed a conventional compact test ring "NIJI-1 (rainbow-1 in English)" and succeeded in SR generation on February 1986. Presented here are useful results indispensable for the development of a compact SR system.

Citation Download Citation

Hiroshi Takada, Kouhei Furukawa, and Takio Tomimasu "Development Of Compact Synchrotron Radiation Ring For X-Ray Lithography", Proc. SPIE 0773, Electron-Beam, X-Ray, and Ion-Beam Lithographies VI, (30 June 1987); https://doi.org/10.1117/12.940379

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