1 September 1987 Production Applications Of Laser Microchemistry
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Abstract
Cutting of conductors using laser-induced chemical etching as well as deposition of conducting links by laser photolysis have been demonstrated. These operations form the basis for a laser microchemistry tool useful for repair or modification of microcircuits. With our prototype system, we have been able to photolytically deposit conducting lines with resistivities of 250 μohm-cm. Because the process is photolytic, deposition can be initiated even over transparent areas, and film growth is well controlled.
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D. C. Shaver, D. C. Shaver, L. A. Stern, L. A. Stern, N. P. Economou, N. P. Economou, D. J. Ehrlich, D. J. Ehrlich, "Production Applications Of Laser Microchemistry", Proc. SPIE 0774, Lasers in Microlithography, (1 September 1987); doi: 10.1117/12.940394; https://doi.org/10.1117/12.940394
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