17 April 1987 A High-Precision, Wide Dynamic Range CCD Based Image Acquisition System
Author Affiliations +
Proceedings Volume 0775, Integrated Circuit Metrology, Inspection, & Process Control; (1987); doi: 10.1117/12.940420
Event: Microlithography Conferences, 1987, Santa Clara, CA, United States
Abstract
This paper describes a novel camera system to make precise measurements over a wide dynamic range of light intensities. The camera has been developed to provide measurements of very small (<1 micrometre) features on semiconductor wafers, observed through high-precision optical microscopes. As such, the system provides the basis of a high precision image acquisition system for use in an advanced line-width measuring instrument.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert E. Melen, Stephen Williams, "A High-Precision, Wide Dynamic Range CCD Based Image Acquisition System", Proc. SPIE 0775, Integrated Circuit Metrology, Inspection, & Process Control, (17 April 1987); doi: 10.1117/12.940420; http://dx.doi.org/10.1117/12.940420
PROCEEDINGS
6 PAGES


SHARE
KEYWORDS
Cameras

Image acquisition

Charge-coupled devices

Imaging systems

Computing systems

Human-machine interfaces

Signal to noise ratio

Back to Top