The Application Of Contour Maps And Statistical Control Charts In Monitoring Dielectric Processes

Alan K. Smith; Edward F. Wang

doi:10.1117/12.940406

17 April 1987 The Application Of Contour Maps And Statistical Control Charts In Monitoring Dielectric Processes

Alan K. Smith, Edward F. Wang

Proceedings Volume 0775, Integrated Circuit Metrology, Inspection, & Process Control; (1987) https://doi.org/10.1117/12.940406
Event: Microlithography Conferences, 1987, Santa Clara, CA, United States

Abstract

For many years the ability to measure dielectric films and then produce a graphic output either in contour map or 3-dimensional form has been either slow or time consuming in labor. With the new generation of equipment on the market this is no longer the case. This paper will describe the operation of this equipment in obtaining contour maps of several typical processes and the use of these maps in the evaluation of these processes and related equipment. The advantage of advanced computer technology also allows the data to be collated for the generation of process control charts within seconds of the collection of the data. The use of these control charts will also be demonstrated.

Citation Download Citation

Alan K. Smith and Edward F. Wang "The Application Of Contour Maps And Statistical Control Charts In Monitoring Dielectric Processes", Proc. SPIE 0775, Integrated Circuit Metrology, Inspection, & Process Control, (17 April 1987); https://doi.org/10.1117/12.940406

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