1 January 1987 Analysis Of Particulate Contamination Buildup On Surfaces
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A method is derived for estimating the relationships between clean room air cleanliness class (FED-STD-209B), exposure time and surface cleanliness level (MIL-STD-1246A). The basis of the method is extrapolation of Hamberg's data on particulate fallout rates observed in clean rooms (J. Envr. Sci. May/June, p.15, 1982). The results are presented in simplified form to estimate clean room requirements for different surface cleanliness levels. A discussion is provided on the particle size distributions observed by Hamberg and Shon (30th Ann. Mtg., Institute for Environmental Sciences).
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. D. Buch, J. D. Buch, M. K. Barsh, M. K. Barsh, "Analysis Of Particulate Contamination Buildup On Surfaces", Proc. SPIE 0777, Optical Systems Contamination: Effects, Measurement, Control, (1 January 1987); doi: 10.1117/12.967066; https://doi.org/10.1117/12.967066


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