1 January 1987 Analysis Of Particulate Contamination Buildup On Surfaces
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Abstract
A method is derived for estimating the relationships between clean room air cleanliness class (FED-STD-209B), exposure time and surface cleanliness level (MIL-STD-1246A). The basis of the method is extrapolation of Hamberg's data on particulate fallout rates observed in clean rooms (J. Envr. Sci. May/June, p.15, 1982). The results are presented in simplified form to estimate clean room requirements for different surface cleanliness levels. A discussion is provided on the particle size distributions observed by Hamberg and Shon (30th Ann. Mtg., Institute for Environmental Sciences).
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J. D. Buch, J. D. Buch, M. K. Barsh, M. K. Barsh, "Analysis Of Particulate Contamination Buildup On Surfaces", Proc. SPIE 0777, Optical Systems Contamination: Effects, Measurement, Control, (1 January 1987); doi: 10.1117/12.967066; https://doi.org/10.1117/12.967066
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