11 May 1987 Justification For Infrared Microimaging In The Design, Manufacture, Test And Screening Of Semiconductor Microcircuits
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Abstract
The applications and potential reliability and cost benefits of infrared microimaging are reviewed. Examples of cost savings are presented to help justify investment in infrared inspection technology and tools.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert B. McIntosh, "Justification For Infrared Microimaging In The Design, Manufacture, Test And Screening Of Semiconductor Microcircuits", Proc. SPIE 0780, Thermosense IX: Thermal Infrared Sensing for Diagnostics and Control, (11 May 1987); doi: 10.1117/12.940508; https://doi.org/10.1117/12.940508
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