11 May 1987 Justification For Infrared Microimaging In The Design, Manufacture, Test And Screening Of Semiconductor Microcircuits
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Abstract
The applications and potential reliability and cost benefits of infrared microimaging are reviewed. Examples of cost savings are presented to help justify investment in infrared inspection technology and tools.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert B. McIntosh, Robert B. McIntosh, } "Justification For Infrared Microimaging In The Design, Manufacture, Test And Screening Of Semiconductor Microcircuits", Proc. SPIE 0780, Thermosense IX: Thermal Infrared Sensing for Diagnostics and Control, (11 May 1987); doi: 10.1117/12.940508; https://doi.org/10.1117/12.940508
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