24 September 1987 "High Fill Factor Silicide Monolithic Arrays"
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Abstract
Monolithic infrared imagers with Schottky-barrier detectors (SBDs) can be constructed with silicon VLSI technology into large and high density focal plane arrays (FPAs). This paper presents a brief review of the available Pd2Si and PtSi SBDs, of the reported SBD FPAs, and of the general consideration for the construction of high fill-factor and high-density monolithic FPAs. The four FPA multiplexer architecture reviewed are: an interline transfer CCD, a charge sweep device, a column-readout MOS, and a row-readout MOS.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Walter F. Kosonocky, Gary W. Hughes, ""High Fill Factor Silicide Monolithic Arrays"", Proc. SPIE 0782, Infrared Sensors and Sensor Fusion, (24 September 1987); doi: 10.1117/12.940565; https://doi.org/10.1117/12.940565
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