1 January 1987 High-Speed, Pulsed-Laser Interferometry
Author Affiliations +
Proceedings Volume 0802, In-Process Optical Metrology for Precision Machining; (1987) https://doi.org/10.1117/12.967119
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands
This paper describes a phase-shifting, self-referencing, interferometer, designed for testing rapidly varying optical surfaces or a pulsed laser wavefront quality. It is the modified version of a general class of phase-shifting interferometers without moving parts: the phase shift and separation of beams are obtained with a stationary diffraction grating. The presentation includes results from experiments, and a review of the systems where its use might be appropriate.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Osuk Y. Kwon, Osuk Y. Kwon, Dean M. Shough, Dean M. Shough, } "High-Speed, Pulsed-Laser Interferometry", Proc. SPIE 0802, In-Process Optical Metrology for Precision Machining, (1 January 1987); doi: 10.1117/12.967119; https://doi.org/10.1117/12.967119


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