1 January 1987 In-Process Optical Metrology For Precision Machining
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Proceedings Volume 0802, In-Process Optical Metrology for Precision Machining; (1987) https://doi.org/10.1117/12.967114
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands
Abstract
Straylight Measurement, Interferometric Measurement, Schlieren Microscopy, Optical Distance Sensing and Capacitive Distance Measurement are reviewed in their potential for in-process metrology. Today existing restraints are outlined and development necessities discussed.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rudiger Haberland, Rudiger Haberland, "In-Process Optical Metrology For Precision Machining", Proc. SPIE 0802, In-Process Optical Metrology for Precision Machining, (1 January 1987); doi: 10.1117/12.967114; https://doi.org/10.1117/12.967114
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