In-Situ Metrology And Machine Based Interferometry For Shape Determination

P . A. McKeown; W. J. Wills-Moren; R. F . Read

doi:10.1117/12.967101

1 January 1987 In-Situ Metrology And Machine Based Interferometry For Shape Determination

P . A. McKeown, W. J. Wills-Moren, R. F . Read

Proceedings Volume 0802, In-Process Optical Metrology for Precision Machining; (1987) https://doi.org/10.1117/12.967101
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

A brief description is given of the successful development of a large computer controlled machine for diamond turning aluminium alloy X-ray mirror substrates (1.5 m (60 in.) dia., 600 mm (24 in.) axial length). The in situ metrology facility for axial profile, roundness and diameter measurement is described, together with the technique for automatic programming of the final tool path to compensate for errors of workpiece deflection, tool setting and edge radius, etc.. Examples are based on the ROSAT and SXT mirrors for which the axial and radial location/mounting surfaces are produced with precise reference to the reflecting surfaces. Adaptation of this type of ultra-precision machine/metrology facility to the production of other types of optical components is also discussed.

Citation Download Citation

P . A. McKeown, W. J. Wills-Moren, and R. F . Read "In-Situ Metrology And Machine Based Interferometry For Shape Determination", Proc. SPIE 0802, In-Process Optical Metrology for Precision Machining, (1 January 1987); https://doi.org/10.1117/12.967101

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