Optical Acceptance Testing For Ultra Precision Air Bearing Machines

P. Langenbeck; W. Ohligs

doi:10.1117/12.967098

1 January 1987 Optical Acceptance Testing For Ultra Precision Air Bearing Machines

P. Langenbeck, W. Ohligs

Proceedings Volume 0802, In-Process Optical Metrology for Precision Machining; (1987) https://doi.org/10.1117/12.967098
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

A rigorous experimental analysis (=acceptance testing) of the dimensional and temporal stability of an ultra precision machine involves the actual manufacture of such components that, as witness sample, allow the application of optical testing. The paper illustrates performance and quality verification tests for ultra precision air bearing spindles and slides with error motions ranging much below lium. Systematic machine errors are pinpointed. Repeated machining on the same surface allows the measurement both of vibrations, and of temporal dimensional changes, as might be caused by thermal growth.

Citation Download Citation

P. Langenbeck and W. Ohligs "Optical Acceptance Testing For Ultra Precision Air Bearing Machines", Proc. SPIE 0802, In-Process Optical Metrology for Precision Machining, (1 January 1987); https://doi.org/10.1117/12.967098

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