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1 January 1987 Phase-Measuring Interferometers For The Optics Shop
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Proceedings Volume 0802, In-Process Optical Metrology for Precision Machining; (1987) https://doi.org/10.1117/12.967122
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands
Abstract
Phase-measuring interferometers were developed as laboratory research instruments and several such products are available commercially. However, the transition from laboratory to optical shop applications has been slow. This paper discusses the advantages of phase-measuring interferometry, the design features that an interferometer needs in order to operate in an optical shop environment, and the performance features of the data acquisition and analysis software package.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H. Philip Stahl "Phase-Measuring Interferometers For The Optics Shop", Proc. SPIE 0802, In-Process Optical Metrology for Precision Machining, (1 January 1987); https://doi.org/10.1117/12.967122
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