An Infinitely Stiff Very High Precision Actuator

P. D. Atherton; T. R. Hicks; N. K. Reay; R. C. Sidey

doi:10.1117/12.941288

11 January 1987 An Infinitely Stiff Very High Precision Actuator

P. D. Atherton, T. R. Hicks, N. K. Reay, R. C. Sidey

Proceedings Volume 0803, Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications; (1987) https://doi.org/10.1117/12.941288
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

The Digital Piezo Transducer (DPT) is a piezo-electric actuator incorporating a capacitance micrometer as an integrated position sensor. This internal micrometer has a positional resolution which is much better than a nanometer. The DPT is operated in a closed servo-loop incorporating an almost perfect integrator stage. As a result the DPT is extremely stiff and is capable of sub-nanometer resolution and stability. It has a response time of better than 1 millisecond and a maximum range of 120 um.

Citation Download Citation

P. D. Atherton, T. R. Hicks, N. K. Reay, and R. C. Sidey "An Infinitely Stiff Very High Precision Actuator", Proc. SPIE 0803, Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications, (11 January 1987); https://doi.org/10.1117/12.941288

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