The requirements for surface quality of workpieces such as metaloptics are increasing, specially if they are used as mirrors in high energy laser system- The precision of figure, slope errors, and surface roughness depend on the performance of the machining process. These facts determine the development of precision and ultraprecision machines. Various parameters influence workpiece quality machined with a single point diamond tool: machine behaviour, technology and environmental factors. esearch work. have demonstrated, that specially the static and dynamic behaviour of ultraprecision machines decisively determines optical surface quality. An improved measurement technique to analyse the static and dynamic behaviour of those machines is presented. The discussion of results from ultraprecision machine tests demonstrated, that it is possible to combine the measured vibration amplitude at the tool during the process with the generated surface texture on the workpiece. The goal of research work today is to find out a measuring approach of machined surfaces, which contents the analysing of the machine tool behaviour. The man in the shop floor will be able to improve the machining process by comparing real and synthetic interferograms. Checking systematic interferogram lists, which content advices of faulty machining parameters, it is possible to get get informations, how to change the machining parameters.