11 January 1987 Mapping The Performance Of Surface-Measuring Instruments
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Proceedings Volume 0803, Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications; (1987) https://doi.org/10.1117/12.941285
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands
Abstract
The performance of a dimensional surface-measuring instrument is usually limited by a small number of critical components or specifications. For example, parameters such as those specifying ranges and resolutions, and probe geometry are needed to define the capabilities of the instrument. The response of the instrument to sinusoidal perturbations of varying amplitude and wavelength, can be mapped in amplitude-wavelength space to show the effect of each parameter and the overall limits of performance.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Margaret Stedman, "Mapping The Performance Of Surface-Measuring Instruments", Proc. SPIE 0803, Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications, (11 January 1987); doi: 10.1117/12.941285; https://doi.org/10.1117/12.941285
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