11 January 1987 Table Motion Systems
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Proceedings Volume 0803, Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications; (1987) https://doi.org/10.1117/12.941286
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands
Abstract
Table motion systems of high precision machines combine several properties, such as very good displacement accuracy and repeatability, small straightness errors of slides and realization of constant velocities. According to these demands special elements are applied, for example high precision slide systems, linear drive systems and metrology systems. A survey about the properties of these elements will be given.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
T. Bispink, M. Weck, "Table Motion Systems", Proc. SPIE 0803, Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications, (11 January 1987); doi: 10.1117/12.941286; https://doi.org/10.1117/12.941286
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