Infrared Detector Based On An Integrated Silicon Thermopile

P. M. Sarro; A. W.V Herwaarden

doi:10.1117/12.941446

10 September 1987 Infrared Detector Based On An Integrated Silicon Thermopile

P. M. Sarro, A. W.V Herwaarden

Proceedings Volume 0807, Passive Infrared Systems and Technology; (1987) https://doi.org/10.1117/12.941446
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

A new thermal infrared detector fabricated using standard silicon IC technology and silicon micromachining is presented. The device consists of a 10-micron thick cantilever beam with one half covered by an absorbing layer and the other half containing a 44-strip p-Si/Al thermopile. The detectors have a responsivity (in vacuum) of 10 V/W and a relative detectivity D*, measured in air and for a 500 K blackbody source, of approximately 5 x 107 cmHzi/W.

Citation Download Citation

P. M. Sarro and A. W.V Herwaarden "Infrared Detector Based On An Integrated Silicon Thermopile", Proc. SPIE 0807, Passive Infrared Systems and Technology, (10 September 1987); https://doi.org/10.1117/12.941446

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available