3 August 1987 Scanning Laser Imaging Of Surface Chemistry And Physics
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Proceedings Volume 0809, Scanning Imaging Technology; (1987) https://doi.org/10.1117/12.941494
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands
Abstract
This paper describes a technique in which an electrolyte solution is used to form a junction with the surface of a metal or semiconductor, and images are formed using phenomena stimulated by scanned illumination of the surface. Photocurrent images showing the spreading and then the breakdown of inhibitor films on copper, and images showing recombination centres, and other electronic features in the surface of gallium arsenide, are presented. The potential application of the method to the in-situ imaging of anodising and etching processes on semiconductors is described. In principle one may obtain information on the spatial distributions of donor density, surface state density and reaction kinetics, and surface film thickness.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
D. E. Williams, D. E. Williams, A. M. Riley, A. M. Riley, R. Peat, R. Peat, } "Scanning Laser Imaging Of Surface Chemistry And Physics", Proc. SPIE 0809, Scanning Imaging Technology, (3 August 1987); doi: 10.1117/12.941494; https://doi.org/10.1117/12.941494
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