9 February 1987 A Novel Concept For Fabrication Of Submicron Geometry Holographic Gratings
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Abstract
Accurate submicron holographic diffraction gratings are fabricated by utilizing the total internal reflection inside a right angle prism. The AlGaAs wafers are coated with photoresist and optically contacted to one face of the prism. Collimated laser radiation entering the hypotenuse of the prism is folded onto itself and interferes in the photoresist. The period of the resulting grating can be tuned by rotating the prism about the axis defined by the apex. This roof configuration not only allows for easy alignment but dictates that both beams interfere at equal and opposing angles with identical intensities. The effects of vibration are limited to rotations about the apex of the prism.
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Edward J. Gratrix "A Novel Concept For Fabrication Of Submicron Geometry Holographic Gratings", Proc. SPIE 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III, (9 February 1987); doi: 10.1117/12.941741; https://doi.org/10.1117/12.941741
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