Groove Profile Measurement Of Diffraction Gratings Using Scanning Electron Microscope

Tatsuo Herada; Eideki Taira; Toshiaki Kita; Masaaki Itou

doi:10.1117/12.941742

9 February 1987 Groove Profile Measurement Of Diffraction Gratings Using Scanning Electron Microscope

Tatsuo Herada, Eideki Taira, Toshiaki Kita, Masaaki Itou

Proceedings Volume 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III; (1987) https://doi.org/10.1117/12.941742
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

A method for measuring diffraction preting groove profiles using a scanning electron microscope is developed. The method is to observe a photoresist well that is straight and normal to the grating grooves. It is formed by using photolithography technology for seticonductor device fabrication. Several types of diffraction gratings are ruled by applying this measurement technology to help control the groove profiles, especially of those with extremely fine and shallow grooves.

Citation Download Citation

Tatsuo Herada, Eideki Taira, Toshiaki Kita, and Masaaki Itou "Groove Profile Measurement Of Diffraction Gratings Using Scanning Electron Microscope", Proc. SPIE 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III, (9 February 1987); https://doi.org/10.1117/12.941742

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