9 February 1987 Large Diffraction Grating Ruling Engine With Nanometer Digital Control System
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Abstract
Modifications to the MIT-B grating ruling engine have recently been installed. In addition to a new ultra-quiet mechanical drive system for the diamond carriage an entirely new digital servo control system has been installed. It operates with a bit size of 0.09 nm, with virtually infinite control levels. Rowland ghost levels are no longer detectable, which implies that periodic error amplitudes are below 0.5 nm.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Erwin G. Loewen, Robert S. Wiley, Geoffrey Portas, "Large Diffraction Grating Ruling Engine With Nanometer Digital Control System", Proc. SPIE 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III, (9 February 1987); doi: 10.1117/12.941737; https://doi.org/10.1117/12.941737
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