9 February 1987 Large Diffraction Grating Ruling Engine With Nanometer Digital Control System
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Abstract
Modifications to the MIT-B grating ruling engine have recently been installed. In addition to a new ultra-quiet mechanical drive system for the diamond carriage an entirely new digital servo control system has been installed. It operates with a bit size of 0.09 nm, with virtually infinite control levels. Rowland ghost levels are no longer detectable, which implies that periodic error amplitudes are below 0.5 nm.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Erwin G. Loewen, Erwin G. Loewen, Robert S. Wiley, Robert S. Wiley, Geoffrey Portas, Geoffrey Portas, } "Large Diffraction Grating Ruling Engine With Nanometer Digital Control System", Proc. SPIE 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III, (9 February 1987); doi: 10.1117/12.941737; https://doi.org/10.1117/12.941737
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