9 February 1987 Micromachined Silicon Periodic Structures For Millimeter- And Submillimeter-Wave Applications
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Abstract
The feasibility of fabricating periodic structures using silicon micromachining for millimeter-and submillimeter-wave applications is investigated. Diffraction gratings and dichroic filters are fabricated and tested.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
L. J. Cheng, L. J. Cheng, G. T. Crotty, G. T. Crotty, J. Farhoomand, J. Farhoomand, K. M. Koliwad, K. M. Koliwad, H. M. Pickett, H. M. Pickett, "Micromachined Silicon Periodic Structures For Millimeter- And Submillimeter-Wave Applications", Proc. SPIE 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III, (9 February 1987); doi: 10.1117/12.941740; https://doi.org/10.1117/12.941740
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