9 February 1987 Observation Of Grating Surfaces By The Use Of STM
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The surfaces of several optical gratings have been observed by a scanning tunneling microscope (STM) in the atomosphere without contacting surface. Blaze angles of optical gratings with 3600 lines/mm and 1200 lines/mm have been measured. It is proved that the scanning tunneling microscopy is one of the useful techniques for topographic mapping of gratings with very fine pitches.
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Takanori Oshio, Yoshiyuki Sakai, Shaw Ehara, "Observation Of Grating Surfaces By The Use Of STM", Proc. SPIE 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III, (9 February 1987); doi: 10.1117/12.941743; https://doi.org/10.1117/12.941743

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