9 February 1987 Observation Of Grating Surfaces By The Use Of STM
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Abstract
The surfaces of several optical gratings have been observed by a scanning tunneling microscope (STM) in the atomosphere without contacting surface. Blaze angles of optical gratings with 3600 lines/mm and 1200 lines/mm have been measured. It is proved that the scanning tunneling microscopy is one of the useful techniques for topographic mapping of gratings with very fine pitches.
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Takanori Oshio, Takanori Oshio, Yoshiyuki Sakai, Yoshiyuki Sakai, Shaw Ehara, Shaw Ehara, } "Observation Of Grating Surfaces By The Use Of STM", Proc. SPIE 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III, (9 February 1987); doi: 10.1117/12.941743; https://doi.org/10.1117/12.941743
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