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23 March 1987 Absolute Distance Interferometry
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Abstract
Measurements of distance obtained interferometrically are modulo(X) but can be made with accuracy of a fraction of the wavelength of the light used. Various techniques have been developed to overcome this limitation and obtain an absolute distance measurement with interferometric accuracy. To accomplish this, it is necessary to make measurements with more than one wavelength. The basic principles of absolute distance interferometry are discussed and the current state of the technology is reviewed.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
N. A. Massie and H.John Caulfield "Absolute Distance Interferometry", Proc. SPIE 0816, Interferometric Metrology, (23 March 1987); https://doi.org/10.1117/12.941763
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