23 March 1987 Accuracy Analysis And Improvements To The Hewlett-Packard Laser Interferometer System
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Abstract
An account is given on how to analyze the measurement accuracy of a laser interferometer system. Each component of the system accuracy budget is discussed, including the magnitude of these components. Two important components of this budget; atmospheric affects and optics thermal drift are discussed in more detail. The effects of these two error components have been significantly reduced on the Hewlett-Packard laser interferometer systems by the use of Wavelength Tracking Compensation and a new interferometer.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C. Steinmetz, C. Steinmetz, R. Burgoon, R. Burgoon, J. Herris, J. Herris, } "Accuracy Analysis And Improvements To The Hewlett-Packard Laser Interferometer System", Proc. SPIE 0816, Interferometric Metrology, (23 March 1987); doi: 10.1117/12.941757; https://doi.org/10.1117/12.941757
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