23 March 1987 Digital Heterodyne Interferometry
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Abstract
Measurements of optical phase differences have been obtained with resolutions of 1/500 wave rms at 100 kHz data rates using frequency shift interferometry. One implementation of this approach, called the digital heterodyne interferometer, uses Bragg cells to generate the frequency shift, and has been applied extensively to real-time, high precision measurements as well as in limited applications to optical testing. We discuss the fundamentals of this approach and review the applications.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
N. A. Massie, N. A. Massie, "Digital Heterodyne Interferometry", Proc. SPIE 0816, Interferometric Metrology, (23 March 1987); doi: 10.1117/12.941754; https://doi.org/10.1117/12.941754
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