23 March 1987 Interferometric Metrology: Current Trends And Future Prospects
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Abstract
Interferometric metrology is now experiencing a major resurgence of interest due to several new developments. This paper presents an overview of current trends and a brief discussion of future prospects.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
P. Hariharan, P. Hariharan, } "Interferometric Metrology: Current Trends And Future Prospects", Proc. SPIE 0816, Interferometric Metrology, (23 March 1987); doi: 10.1117/12.941752; https://doi.org/10.1117/12.941752
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