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23 March 1987 Recent Advances In Interferometry At Zygo
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Abstract
This paper will discuss some of the recent advances in the field of interferometry that have been made at Zygo. In the past year Zygo has introduced five major advances in the interferometry field: the 5500 Heterodyne Profiler, the AXIOM 2/20 distance measuring interferometer, a 450mm phase modulator for large aperture phase interferometry, a phase measuring interferometer at 351nrn and the Mark IV programmable phase measuring interferometer. The presentation will conclude with a general discussion of what Zygo sees for the future of interferometry.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. A. Smythe, J. A. Soobitsky, and B. E. Truax "Recent Advances In Interferometry At Zygo", Proc. SPIE 0816, Interferometric Metrology, (23 March 1987); https://doi.org/10.1117/12.941758
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