23 March 1987 Wyko Systems For Optical Metrology
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Abstract
WYKO produces interferometer systems for a number of optical metrology applications. Systems to be discussed include: WISP, an interferogram analysis package that uses input from a graphics digitizing tablet or video camera; TOPO, a microscope system for profiling surfaces such as mirrors, hard disks, magnetic tape, and paint; SIRIS, used to test optical components ranging in size from a millimeter to meters; IR3, a 10.6 μm Twyman-Green interferometer for testing up to 16-in, diameter objects; LADITE, a wavefront analysis system whose major application is the testing of diode lasers; HOLOCAM, for quantitative holographic interferometry; and MAX, a projected fringe contouring system. All products but WISP use phase-measurement interferometry principles to obtain data. This paper gives the general operational principles of these systems and describes some of their applications and results.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Katherine Creath, Katherine Creath, } "Wyko Systems For Optical Metrology", Proc. SPIE 0816, Interferometric Metrology, (23 March 1987); doi: 10.1117/12.941760; https://doi.org/10.1117/12.941760
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