23 March 1987 Wyko Systems For Optical Metrology
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Abstract
WYKO produces interferometer systems for a number of optical metrology applications. Systems to be discussed include: WISP, an interferogram analysis package that uses input from a graphics digitizing tablet or video camera; TOPO, a microscope system for profiling surfaces such as mirrors, hard disks, magnetic tape, and paint; SIRIS, used to test optical components ranging in size from a millimeter to meters; IR3, a 10.6 μm Twyman-Green interferometer for testing up to 16-in, diameter objects; LADITE, a wavefront analysis system whose major application is the testing of diode lasers; HOLOCAM, for quantitative holographic interferometry; and MAX, a projected fringe contouring system. All products but WISP use phase-measurement interferometry principles to obtain data. This paper gives the general operational principles of these systems and describes some of their applications and results.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Katherine Creath, Katherine Creath, "Wyko Systems For Optical Metrology", Proc. SPIE 0816, Interferometric Metrology, (23 March 1987); doi: 10.1117/12.941760; https://doi.org/10.1117/12.941760
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