1 January 1987 A Method For Extending The Measurement Range Of A Two-Dimensional Surface Profiling Instrument
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Abstract
This paper discusses the application of interferometric subaperture testing techniques to a two-dimensional optical surface profiling instrument. The optical profiler, a phase-modulated interference microscope, enables the acquisition of a high density of data over a restricted range. The extent of a profile measurement range is determined by the microscope objective used in the interferometer. However, by overlapping a series of collinear interferograms it becomes possible to increase the limited field of view of this instrument. An outline summarizing the instrument and the algorithms used to concatenate interferograms is presented, as well as experimental data obtained from the instrument. Various methods for characterizing the errors that are introduced by the concatenation of a series of interferograms are discussed. Results of a Monte Carlo simulation study on computer-generated data sets is analyzed to further illuminate error sources and limitations of this technique.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
E. R. Cochran, K. Creath, "A Method For Extending The Measurement Range Of A Two-Dimensional Surface Profiling Instrument", Proc. SPIE 0818, Current Developments in Optical Engineering II, (1 January 1987); doi: 10.1117/12.978908; https://doi.org/10.1117/12.978908
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