Nonlinear Characteristics Of A Stylus Profilometer

S. R. Wilson; G A. Al-Jumaily; J. R. McNeil

doi:10.1117/12.967467

1 January 1987 Nonlinear Characteristics Of A Stylus Profilometer

S. R. Wilson, G A. Al-Jumaily, J. R. McNeil

Proceedings Volume 0818, Current Developments in Optical Engineering II; (1987) https://doi.org/10.1117/12.967467
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

Stylus surface profiling instruments have found application in the characterization of microroughness. Recently, Al-Jumaily [1] has compared data obtained using a stylus profilometer and an optical scatterometer to characterize a metal surface. The stylus profilometer data was found to be inconsistent with the optical data. In resolving this discrepancy, the "transfer functions" of the instruments were identified as the source of the disagreement. Upon investigation of the stylus properties using a computational model, the stylus is found to provide a nonlinear, lowpass filter-like measurement of surface structure. The data provided by the stylus instrument cannot be easily post-processed to give an accurate profile of the surface. These results will be discussed.

Citation Download Citation

S. R. Wilson, G A. Al-Jumaily, and J. R. McNeil "Nonlinear Characteristics Of A Stylus Profilometer", Proc. SPIE 0818, Current Developments in Optical Engineering II, (1 January 1987); https://doi.org/10.1117/12.967467

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