Computer Simulation Of The Cross-Sectional Morphology Of Thin Films

Bangyi Yang; Barbara L. Walden; Russell Messier; William B. White

doi:10.1117/12.941843

2 February 1988 Computer Simulation Of The Cross-Sectional Morphology Of Thin Films

Bangyi Yang, Barbara L. Walden, Russell Messier, William B. White

Proceedings Volume 0821, Modeling of Optical Thin Films; (1988) https://doi.org/10.1117/12.941843
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

Two macroscopic two-dimensional geometrical models have been developed to describe the cross-sectional morphology of thin films which exhibit columnar microstructure. Using simple geometrical assumptions and assumptions based on experimental results, these models trace the evolution of cone-like clusters from their point of nucleation within the film to their emergence at the top surface. The simulated films are then characterized by calculating their roughness as a function of film thickness for different input parameters.

Citation Download Citation

Bangyi Yang, Barbara L. Walden, Russell Messier, and William B. White "Computer Simulation Of The Cross-Sectional Morphology Of Thin Films", Proc. SPIE 0821, Modeling of Optical Thin Films, (2 February 1988); https://doi.org/10.1117/12.941843

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