2 February 1988 Computer Simulation Of The Cross-Sectional Morphology Of Thin Films
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Abstract
Two macroscopic two-dimensional geometrical models have been developed to describe the cross-sectional morphology of thin films which exhibit columnar microstructure. Using simple geometrical assumptions and assumptions based on experimental results, these models trace the evolution of cone-like clusters from their point of nucleation within the film to their emergence at the top surface. The simulated films are then characterized by calculating their roughness as a function of film thickness for different input parameters.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bangyi Yang, Barbara L. Walden, Russell Messier, William B. White, "Computer Simulation Of The Cross-Sectional Morphology Of Thin Films", Proc. SPIE 0821, Modeling of Optical Thin Films, (2 February 1988); doi: 10.1117/12.941843; https://doi.org/10.1117/12.941843
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