2 February 1988 Computer Simulation Of The Cross-Sectional Morphology Of Thin Films
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Two macroscopic two-dimensional geometrical models have been developed to describe the cross-sectional morphology of thin films which exhibit columnar microstructure. Using simple geometrical assumptions and assumptions based on experimental results, these models trace the evolution of cone-like clusters from their point of nucleation within the film to their emergence at the top surface. The simulated films are then characterized by calculating their roughness as a function of film thickness for different input parameters.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bangyi Yang, Bangyi Yang, Barbara L. Walden, Barbara L. Walden, Russell Messier, Russell Messier, William B. White, William B. White, } "Computer Simulation Of The Cross-Sectional Morphology Of Thin Films", Proc. SPIE 0821, Modeling of Optical Thin Films, (2 February 1988); doi: 10.1117/12.941843; https://doi.org/10.1117/12.941843


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