2 February 1988 Computer Simulation Of The Nucleation And Growth Of Optical Coatings
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Comprehensive computer experiments have been performed on various aspects of thin film deposition and growth in attempts to bridge the gap between theoretical predictions and experimental observations and to facilitate the development a realistic model for predictive purposes. The results enhance our understanding of the underlying physical processes and provide a vehicle for demonstrating relationships between fabrication conditions and subsequent film properties. Ultimately, we hope that this understanding will improve process reproducibility and promote our ability to produce desirable film properties. This paper comprehensively surveys the modeling of amorphous solids and, in the course of examining prior simulations of thin film deposition and growth, identifies areas that warrant particular attention.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Brian J. Bartholomeusz, Brian J. Bartholomeusz, Karl-Heinz Muller, Karl-Heinz Muller, Michael Ray Jacobson, Michael Ray Jacobson, } "Computer Simulation Of The Nucleation And Growth Of Optical Coatings", Proc. SPIE 0821, Modeling of Optical Thin Films, (2 February 1988); doi: 10.1117/12.941839; https://doi.org/10.1117/12.941839


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